EUV Lithography Downtime Impact Calculator

Blend downtime duration, sustained wafers per hour, wafer-level margin, salvage expectations, and penalty charges to size the financial impact of an EUV lithography outage in minutes.

Total hours the EUV scanner is unavailable for production (include tool qualification and ramp time).
Throughput of the affected EUV tool in fully productive hours (use your actual sustained wafers per hour).
Gross margin captured per wafer shipped from the stepper or lithography module.
Percent of wafer margin expected to be recovered via rework or salvage (enter 0 if nothing can be saved).
Defaults to $0.00. Add contractual penalties, expediting, or overtime costs triggered by the outage.

Actual financial exposure may vary with contract terms, downstream constraints, and yield recovery. Validate outputs against fab cost accounting before reporting.

Examples

  • Example 1 — 10-hour outage, 150 wafers per hour, $1,800.00 margin, 10% salvage ⇒ Projected gross margin loss: $2,700,000.00 USD • Net loss after salvage and penalties: $2,430,000.00 USD • Loss per downtime hour: $243,000.00 USD • Wafers missed: 1,500.00
  • Example 2 — 6-hour outage, 180 wafers per hour, $2,050.00 margin, 5% salvage, $250,000.00 penalties ⇒ Projected gross margin loss: $2,214,000.00 USD • Net loss after salvage and penalties: $2,353,300.00 USD • Loss per downtime hour: $392,216.67 USD • Wafers missed: 1,080.00

FAQ

How should I treat partially completed lots?

Estimate the percent of margin you expect to recover through rework and enter it as the salvage rate so the calculator offsets the gross loss appropriately.

Can I include downstream bottlenecks?

Yes. Add the expected penalties or overtime spend in the optional field to reflect ripple effects beyond the EUV bay.

What if downtime spans multiple shifts?

Multiply the downtime hours across all affected shifts so the missed wafer calculation reflects the full impact on your production calendar.

Does the tool account for wafer mix?

Use the average contribution margin per wafer for the mix scheduled during the outage; rerun the model with different margins if product mix changes.

How do I translate the loss into per-die impact?

Divide the loss per downtime hour by dies per wafer to estimate the revenue exposure per die for executive briefings or insurance claims.

Additional Information

  • Gross margin loss multiplies missed wafers by contribution margin to capture the opportunity cost of the outage.
  • Salvage recovery reduces the loss when partially processed wafers can be reworked or repurposed.
  • Penalty costs let you add expedited freight, overtime, or liquidated damages triggered by late delivery.
  • Loss per downtime hour highlights the urgency of restoring the EUV tool to service and negotiating vendor SLAs.
  • Wafers missed quantifies the production shortfall driving the financial impact.
  • The model focuses on the impacted EUV module; extend the logic to upstream or downstream tools if the outage ripples across the fab.

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